| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8815a86d5f00dcc8bbbfc7ee6b43077f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S277-913
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C2300-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T74-20354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3175 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C33-748
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C29-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C32-0603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C32-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70716 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C32-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 |
| filingDate |
1997-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_372ad96726974c5e8fcbd50d22a0696c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdf1b03b714c2c9592c8f2f63ad0c19d |
| publicationDate |
1998-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0883892-A1 |
| titleOfInvention |
Vacuum compatible linear motion device |
| abstract |
A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus esentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload. |
| priorityDate |
1996-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |