| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc6220b93fae4be14ada49e4ecc1860b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
1998-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14e5e046f6e57c6d2b0e1c51f1aa2224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02a90679d6a8205bc65e3304c5ef81cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e741e2370a4d001d8ee2356810e27adf |
| publicationDate |
2005-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0875787-B1 |
| titleOfInvention |
Method for reducing the substrate dependence of resist |
| priorityDate |
1997-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |