| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32247 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
1998-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdcb49d729fe5df89e6ed804d2673217 |
| publicationDate |
1998-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0874386-A2 |
| titleOfInvention |
Apparatus and process for remote microwave plasma generation |
| abstract |
An apparatus and methods for a CVD system incorporates a plasmansystem for efficiently generating a plasma remotely from a substrate processing zone.nThe remotely generated plasma may be used to clean unwanted deposits from anchamber, or may be used during substrate processing for etching or depositingnprocesses. In a specific embodiment, the present invention provides an easilynremovable, conveniently handled, and relatively inexpensive microwave plasma sourcenmounted on the lid of a deposition system. The remote microwave plasma source has anplasma reaction volume that is relatively large compared to a plasma applicator tubenvolume. Locating the gas inlet between the plasma reaction volume and a microwavenpower coupler improves the conversion efficiency of microwave energy to ionic plasmanspecies. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102802337-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6830624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1190605-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1190605-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0863536-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102802337-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0863536-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6361707-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0198555-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011116991-A1 |
| priorityDate |
1997-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |