| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a916e03e9b9d6e2e9655219cd75abb5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
1998-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_563a3cb91b30c5a6baefb09dea992e31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf619cdd17d16a3a387f58f069675092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c9d7f3c9583e14b5c62eb68397fc561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3083a1e06e1ad134f105cad4300bdd53 |
| publicationDate |
2008-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0871214-B1 |
| titleOfInvention |
Process for polishing dissimilar conductive layers in a semiconductor device |
| priorityDate |
1997-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |