| abstract |
The present invention is directed to a method for making fused silica glass. A liquid, preferably halide-free, silicon-containing compound capable of being converted by thermal oxidative decomposition to SiO2 is provided and introduced directly into the flame of a combustion burner, thereby forming finely divided amorphous soot. The amorphous soot is deposited on a receptor surface where, either substantially simultaneously with or subsequently to its deposition, the soot is consolidated into a body of fused silica glass. The invention further relates to an apparatus for forming fused silica from liquid, preferably halide-free, silicon-containing reactants which includes: a combustion burner which, in operation, generates a flame; an injector for supplying a liquid silicon-containing compound to the flame to convert the compound by thermal oxidative decomposition to a finely divided amorphous soot; and a receptor surface on which the soot is deposited. |