http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0867920-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 1998-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4b9b6b41d14e456990a425a42d30b7c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfa9f971da421519aafdcec084b4af1d |
| publicationDate | 1998-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0867920-A2 |
| titleOfInvention | Thin film formation process |
| abstract | A process for thin film formation is providednwhich comprises a step of separation of a substratenconstituted of a nonporous Si layer, a porous Si layernformed thereon, and a less porous Si layer formednfurther thereon into the nonporous Si layer and thenless porous Si layer at the porous Si layer, whereinnthe separation is caused by projecting a laser beamnthrough the side face of the substrate. From thenseparated substrate, an SOI substrate is prepared, andnthe non porous Si layer is recycled to the SOInsubstrate production process. This SOI substratenproduction process saves the consumption of thenmaterial and lowers the production cost. Thensubstrates are separated definitely. A process fornproducing a photoelectric transducing apparatus such asnsolar cells with material saving and low cost is alsonprovided in which the porous layer is separatedndefinitely without strong adhesion between thensubstrate and a jig. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6860963-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6521078-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007021991-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007021991-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017223296-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006066658-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6418999-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006066658-A2 |
| priorityDate | 1997-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.