| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3615c23ca02b8b36fcd7896f93aec1f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9bceffddb90b9b3da8a772212961764b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2791-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2011-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C41-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C41-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B12-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C26-00 |
| filingDate |
1998-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d971ed993e8227033832d813ae4bc56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d47f3ba123ecd08169d3c825afb5b1ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cabe37d9cdfc3dc8ab786065a127f0c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8b1ec93a12d7bf0ae84444fb8b53e23 |
| publicationDate |
2002-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0854024-B1 |
| titleOfInvention |
Thin-film fabrication method and apparatus |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I549760-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7922554-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8197295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7744438-B2 |
| priorityDate |
1997-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |