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filingDate 1998-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b12c363d9ecc36a80e90f5a1efd48cf
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publicationDate 1998-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0853970-A3
titleOfInvention An improved process and system for separation and recovery of perfluorocompound gases
abstract Processes and systems to recover at least one perfluorocompound gas from a gasnmixture are provided. In one embodiment the inventive process comprises providing a gasnmixture comprising at least one perfluorocompound gas and at least one carrier gas, the gasnmixture being at a predetermined pressure; providing at least one size selective membranenhaving a feed side and a permeate side; contacting the feed side of the at least onenmembrane with the gas mixture; withdrawing from the feed side of the membrane as a non-permeatenstream at a pressure which is substantially equal to the predetermined pressure anconcentrated gas mixture comprising essentially the at least one perfluorocompound gas;nand withdrawing from the permeate side of the membrane as a permeate stream a depletedngas mixture comprising essentially the at least one carrier gas.
priorityDate 1997-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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