http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0836119-B1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-375
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-06
filingDate 1997-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2003-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bf1bee3ccbed7137d422a9d597fc748
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59eadf285acfb6602f3100b84904090b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b667444482c086cf68624525e7ef3ce6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55f706d6ba68b9ce784eae9e854ee0e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_100b3abd43e4cab0ed7b01f7b2cda41a
publicationDate 2003-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0836119-B1
titleOfInvention Chemically amplified resist composition
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109384909-A
priorityDate 1996-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11448
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128705840
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53721977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226572761
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24950
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11041138
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426117550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128110749
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407832259
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17836188
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420061
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6541030
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87065048
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411741
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410475848
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9548680
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393640
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13129031
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407219005
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456499870
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226424742
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12729361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453986347
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID232847296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17892984
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129245350
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129473051
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226466341
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128543320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415767053
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129470774
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453866832
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411740
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87060404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421243907
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405985
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129022830
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405986
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129950273
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393282
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID97965

Total number of triples: 85.