| abstract |
A particle sensor includes, a sensor element comprisingn(a) a vibrating section having such a mass that is sensitivento the collision of solid particles contained in a fluid,nwith the vibrating section and (b) a detecting section forndetecting the vibration of the vibrating section caused bynsaid collision and converting the vibration to electricnsignals, a housing for fixing said sensor element, an inletnnozzle forming a fluid inlet, and an outlet nozzle forming anfluid outlet. In the particle sensor, the outlet nozzle isnprovided so that the sensor element is between the inletnnozzle and the outlet nozzle, throughholes are formed in thensensor element in at least part of the vicinity of thenvibrating section, and the fluid entering the particlensensor from the inlet nozzle collides with the sensor element,npasses through the throughholes and leaves the particlensensor from the outlet nozzle, which particle sensor hasnsuch a characteristic structure that the speed of a fluidncolliding with the sensor element can be changed. Thisnparticle sensor can measure the sizes and particle sizendistribution of particles contained in a fluid, easily in anshort time. |