http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0823584-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_219b4a2bbb3c63148ae31e7aaa2d6fae |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-0119 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-058 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-0109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2227-04 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04 |
| filingDate | 1997-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89147137589efa1a9e791e2a3e5903f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf527d6d8ca07c501eddc3135bc58a53 |
| publicationDate | 1998-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0823584-A1 |
| titleOfInvention | Gas filling method and facility |
| abstract | A gas filling facility and method in which thenpurity of a gas to be filled is restrained from lowering,nare provided. n In a gas filling facility 10 according to thenpresent invention, it is destined that the connection ofna gas supply pipe 44 and a gas filling pipe 28 attachednon gas containers 12 is performed in an exclusive cleannroom 42 and the storage of the gas filling pipe 28 isnperformed in another clean room 26. It is thereforenpossible to attempt the down-sizing of these clean roomsnin volume, and it is enabled to enhance the degree ofncleanness of each clean room. Even if the inside of thengas filling pipe 28 is exposed to air in the clean roomnwhen handling the same gas filling pipe 28, accordingly,nsuch a danger that floating particles invade thereinto isnreduced. Since it is destined that when the gas fillingnpipe is stored, ultra- high purity nitrogen gas is causednto flow through the inside thereof, furthermore,naccording to the present invention, the inside of the gasnfilling pipe for use in the gas filling can be kept undernan extremely clean state. By virtue of this fact, itnbecomes also possible to prevent the gas purity fromnlowering. |
| priorityDate | 1996-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.