| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
1996-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b61cbbfebd0f206a116319ec3841228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f01b89a691ebded8017f297a882081fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f395250da28dead80c07d80cbdbe77be |
| publicationDate |
1997-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0811246-A1 |
| titleOfInvention |
Tunneling technology for reducing intra-conductive layer capacitance |
| abstract |
The control speed of semiconductor circuitry is increased by forming air tunnels (41) in the interwiring spaces (2) of a conductive pattern (1) to reduce intraconductive layer capacitance. |
| priorityDate |
1995-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |