http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0802417-A2
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ea8cc436e6d31923086586e8d270a88e |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-123 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
filingDate | 1997-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fe5592ef317e785d5e24e9eedbbb31a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4858c98c91b517edbcd43c8c1e4c4742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc4a99eb32285b5a928a0319db571273 |
publicationDate | 1997-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | EP-0802417-A2 |
titleOfInvention | Semiconductor acceleration sensor |
abstract | To reduce torsion-induced errors, a semiconductor acceleration sensor device has a body member including a sensor portion (1) movable in response to a force of acceleration, sensing means (2) for providing a signal representative of such movement, a support member (5) separate from said body member, and means (3,6) interconnecting said support to one end of said body member, wherein said sensing means are provided on two opposing faces of said sensor portion. The acceleration sensor may have bridge circuits on the two opposed faces element and means averaging the outputs from the bridge circuit to prevent torsion-induced acceleration detection, weights provided on both side faces to make it less likely to receive influences from other axes, and a semiconductor integrated circuit as a support substrate so noise has been reduced and the yield has been increased. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6006606-A |
priorityDate | 1996-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57420512 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452198021 |
Total number of triples: 18.