http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0800665-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03627f82d4edc6567f9627df6efdde5d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-023 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1995-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_522dcc9ae8bf04672ff3b0cfc51b3341 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1987491701b1dd660141c121767a856a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e78cebd3596bcf4564de914a4e3ea29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_365f75e5c184390553516285ba420260 |
| publicationDate | 1997-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0800665-A1 |
| titleOfInvention | Low metal ions p-cresol oligomers and photosensitive compositions |
| abstract | Process for producing a photosensitizer comprising a diazo ester of a p-cresol oligomer where at least one of the hydroxy groups on the p-cresol ring has been esterified with diazo-sulfonyl chloride comprising from about 60 to 100 mole % 2,1,4 or 2,1,5-diazo sulfonyl chloride, or a mixture thereof; and a photoresist comprising an admixture of the photosensitizer, which is present in the photoresist composition in an amount sufficient to uniformly photosensitize the photoresist composition, a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition, and a suitable solvent. |
| priorityDate | 1994-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 83.