http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0780732-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc6220b93fae4be14ada49e4ecc1860b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1996-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e741e2370a4d001d8ee2356810e27adf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a81872ce4fe3bcda5a1b226b69fd10d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1f443c4b61b7b71ea5ee42040b4badf |
| publicationDate | 2003-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0780732-B1 |
| titleOfInvention | Polymer composition and resist material |
| abstract | A polymer composition comprising (i) a polymer (a) having a monomer unit containing a functional group A which becomes alkali-soluble by heating in the presence of an acid, (ii) a polymer (b) having a monomer unit containing a functional group B which also becomes alkali-soluble, but less easily than the functional group A, by heating in the presence of an acid, and if necessary in addition to (i) and (ii) or in place of (ii), (iii) a phenolic compound having a weight-average molecular weight of 300 to 15,000 gives together with an photoacid generator a resist material suitable for forming a pattern excellent in sensitivity, resolution, mask linearity and other properties. <IMAGE> <IMAGE> <IMAGE> |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9994538-B2 |
| priorityDate | 1995-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 514.