| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-39 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-433 |
| filingDate |
1996-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46d02cb690f5afcd05a12d65d4e7737d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75a97a35d3fbf61fda25a44296e387c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cfb01868e3210ae875dbad5b537d1f7 |
| publicationDate |
2008-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0768525-B2 |
| titleOfInvention |
Method of detecting a gas phase molecular species in the chamber effluent of a semiconductor processing chamber, and semiconductor processing system incorporating the same |
| priorityDate |
1995-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |