| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bbfa724375cd640ff8bdcf06277096b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M6-181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M10-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M6-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C30-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M10-0585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M6-188
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M10-0562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M6-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M10-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M6-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate |
1995-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55aedaa430b950873e65cc8f7c6d2d76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e692c62cbe6d881e6ac63e17fef44dde
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7809774d44a2f7381335663a98402c7e |
| publicationDate |
1997-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0764221-A1 |
| titleOfInvention |
Apparatus for deposition of thin-film, solid state batteries |
| abstract |
A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material. The apparatus minimally includes at least three distinct evacuable deposition chambers (8, 9, 10), which are physically interconnected in series. The first deposition chamber (8) is adapted to deposit a layer of battery electrode material having a first polarity onto the substrate. The second deposition chamber (9) is adapted to deposit a layer of solid-state electrolyte material onto the layer of battery electrode material deposited in the first chamber (8). The third deposition chamber (10) is adapted to deposit a layer of battery electrode material having an opposite polarity from that deposited in the first chamber (8) onto the solid-state electrolyte. The deposition chambers (8, 9, 10) are interconnected by gas gates (12) such that the substrate material is allowed to proceed from one deposition chamber to the next, while maintaining gaseous segragation between the chambers. |
| priorityDate |
1994-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |