| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26533 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
1995-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fa7bf628d15d36781b19c541008f252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa37f4cd0ed8ac8148267593a31fd3a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ca515145c0073fa8694453cb0a03012 |
| publicationDate |
2000-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0760162-B1 |
| titleOfInvention |
Method for production of a structure with a low level of dislocations and having an oxide layer buried in a semiconductor substrate |
| priorityDate |
1994-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |