| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-762 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
1995-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad93c3774fc04460eb11931e0a8d442e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54af129d6a00f26c9ee8fdd75a5e0772
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c25b84caa8958f50877e400731ea3ed |
| publicationDate |
1999-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0745271-B1 |
| titleOfInvention |
Process for producing a diffusion region adjacent to a recess in a substrate |
| priorityDate |
1994-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |