http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0745211-A4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f94649ee75fa6e095df073d4940d039 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7049 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00 |
| filingDate | 1995-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a75b22299c32b252f9a82f8066ece0e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00e338ac10244e1750afd44de0924500 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32eeedc3d6f63bdc74394f748b2fed61 |
| publicationDate | 1997-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0745211-A4 |
| titleOfInvention | GRID-GRID INTERFEROMETRIC ALIGNMENT SYSTEM |
| abstract | The present invention provides a grating-grating interferometric alignment system for microlithography. It includes an electromagnetic radiation source (116) of a coherent single or multiple discrete wavelengths or in some cases broadband electromagnetic radiation (132), a detector (116) of the intensity of the return electromagnetic radiation (134), x- and y- oriented independent linear mask grating (109), a checkerboard pattern wafer grating (110), and frequency component extraction (118), phase detection (120), and signal processing (121) for determining alignment from the return electromagnetic radiation (134) intensity measured as a function of the relative position of the wafer and mask grating (109, 110). |
| priorityDate | 1994-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5184 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414858276 |
Total number of triples: 18.