http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0737856-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e85662883ee11f4790be9874238ffa65 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-447 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J4-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-447 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21 |
| filingDate | 1996-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d8c7eda4ae0a6a557c0f8f997c1bcd0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_218994dc98997c0f0a5e9dccf5d7a802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_676b1609c52da31fc539e8916c204edc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fd67d44bbcc9e4fd3e5ff40c6cf902b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dd6756d95c4ffca1b2a3eefbb931b72 |
| publicationDate | 1996-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0737856-A2 |
| titleOfInvention | Polarisation monitoring methods and apparatus |
| abstract | A system and method for controlling polarisation state determining parameters of a polarised beam of light in an ellipsometer or polarimeter and the like system, so that they are in ranges wherein the sensitivity, of a sample system characterising PSI and DELTA value monitoring detector (DET) used to measure changes in said polarisation state resulting from interaction with a "composite sample system," comprised of a sample system per se. (SS) and a beam polarisation state determining variable retarder, to noise and measurement errors etc. therein), is reduced. This allows determining sample system per se. ncharacterising PSI and DELTA values, from Composite Sample System characterising PSI and DELTA values, by compensating for the presence of components, (VR1) and/or (VR2), added to an ellipsometer or polarimeter and the like system. The arrangement also improves the ability of an ellipsometer or polarimeter and the like system fitted with components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterising PSI and DELTA determining data values, wherein a sample system per se. investigating polarised beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. The arrangement also allows determination of the "Handedness" of a polarised beam of light, and of sample system Jones or Mueller Matrix component values; and provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter and the like system. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103134592-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111448477-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1078217-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103134592-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1078217-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1197741-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1197741-A3 |
| priorityDate | 1995-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.