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filingDate 1996-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1996-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0737027-A2
titleOfInvention Integrated circuit testing board having constrained thermal expansion characteristics
abstract A board (10) for testing an integrated circuit disposed on a semiconductor wafer. The board contains a plurality of substantially parallel signal layers (14) and power planes (16) that are supported and electrically isolated by a dielectric material (12). One or more constraint layers (18,20) are disposed in the dielectric material, and the constraint layers have a coefficient of thermal expansion of about 1-6 ppm/ o C. In a preferred embodiment, the dielectric material is a fluoropolymer with a ceramic or silica filler, and the constraint layers are an iron-nickel alloy of about 30-40 percent nickel by weight. The board has thermal expansion characteristics substantially similar to silicon to ensure good contact to a silicon wafer during burn-in testing.
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priorityDate 1995-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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