| abstract |
A layer forming material is a compound which has a structure of six-membered ring coordinated to Cu and containing Si, and of which general formula is represented by the following chemical formula:n wherein X 1 and X 2 are elements of the VI group of the same or different types which are coordinate-bonded to Cu, and of which examples include O, S, Se, Te and the like, at least one of Y 1 , Y 2 and Y 3 is Si, L is a group which has a double or triple bond and which is able to supply electrons to Cu, and each of R 1 and R 2 is any of SiF 3 , SiH 3 , CF 3 and CH 3 for example. |