http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0731188-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-0521 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01P7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01P11-00 |
| filingDate | 1996-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80a181456bc16d903d14af18b61686e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e22061b6a13091e5c32e6c5c02f181d |
| publicationDate | 1996-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0731188-A2 |
| titleOfInvention | Apparatus and method for depositing films on substrate via off-axis laser ablation |
| abstract | The apparatus for depositing thin films on both a first surface and a second surface of the substrate via off-axis laser ablation according to present invention comprises (1) a vacuum chamber (202), the vacuum chamber having (a) a first target (212a) of a first deposition material supported by a first target holder (214a), (b) a second target (212b) of a second deposition material supported by a second target holder (214b) so as to positioned to be substantially coplanar with the first target, (c) a substrate holder (210) for holding a substrate (208) above a space between the first and second targets, the substrate being oriented to be substantially perpendicular to the targets, (d) a heating means (216) for heating the first and second surfaces of the substrate, (e) a first entrance window (220a) through which a first laser beam passes to impinge onto the first target with a predetermined angle, and (f) a second entrance window (220b) through which a second laser beam passes to impinge onto the second target with a predetermined angle and (2) a laser optical system comprising at least one laser beam source (222) and an optical path system from said laser beam source to said targets, the optical path system including mirrors (224, 228) for reflecting the laser beams toward the targets through the first and second enctrance windows of the chamber. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103540899-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103540899-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19914129-C2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19914129-A1 |
| priorityDate | 1995-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.