| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc6220b93fae4be14ada49e4ecc1860b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
1995-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6744a67635ff95df5490276fc5a01d61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db2c9481997264fcf7979f52409c012c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43198d99580160b4386f9bd36029afef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3670226e07ebfb68c2ba669f5ff1114a |
| publicationDate |
1999-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0704762-B1 |
| titleOfInvention |
Resist material and pattern formation |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9994538-B2 |
| priorityDate |
1994-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |