| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-18 |
| filingDate |
1994-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b721829ed328685c43462a71e312398
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5708599f299e80a198220812862e264 |
| publicationDate |
1997-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0685143-B1 |
| titleOfInvention |
Linear microwave source for the plasma treatment of surfaces |
| abstract |
The linear microwave source for the treatment of surfaces comprises: a sealed housing (1); means (B1, B2; A1, A2) to create a magnetic field in the housing and to generate a plasma sheet (P); coupling means between the microwave emission means and the housing (1); at least one target (2); pumping means (3); gas injection means (9) for the control of ionic species of the plasma sheet (P). Application particularly for the plasma treatment of surfaces. |
| priorityDate |
1993-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |