| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c24684033fba97d1ad845ce453a57e3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D277-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D333-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C317-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-73 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D333-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C317-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D277-62 |
| filingDate |
1993-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab6410b4e1cb5bc480082b00084c3041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bf50d594d949651caf990937289dc2f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8befffd727da55c2e3c9676f19dfd713
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ceb9604302a7c8f95303a47e8d2b910
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35dc5905784fb4ac4f28550794b3a493 |
| publicationDate |
1995-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0681713-A1 |
| titleOfInvention |
Sulphonic acid esters, radiation-sensitive mixtures made therewith, and their use |
| abstract |
The invention relates to sulphonic acid esters and radiation-sensitive, positive or negative tone mixtures made therewith, with: a) a compound forming a strong acid on irradiation; b) either a compound with at least one acid-decomposable C-O-C or C-O-Si bond (for a positive tone mixture) or a compound with at least acid-cross-linkable groups (for a negative tone mixture) and c) a water-insoluble binder which however is soluble or at least wettable in aqueous-alkaline solutions, in which compound a) is a sulphonic acid ester of the formulae [R<1>-CR<2>(CF3)-O-SO2-]nR<3> or R<1>[-CR<2>(CF3)-O-SO2-R<3>]m. The mixtures exhibit unexpectedly high sensitivity in the DUV range and improved resolution. It is especially advantageous that the mixtures are insensitive to changes in the storage time between exposure and post-heating. |
| priorityDate |
1993-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |