| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B7-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-035 |
| filingDate |
1995-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ba44584afcbb2d66dfa5ab6b3a00d17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42f3086ecf7e47588bd184e082b72a03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b638fc3d0a4a54def98fb18eede7a3e |
| publicationDate |
1995-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0678598-A1 |
| titleOfInvention |
Oxide dielectric thin film and preparation thereof |
| abstract |
A process for preparing an oxide dielectric thin film which involves the steps of treating a substrate surface for hydroxylation and then forming an oxide dielectric thin film on the surface using at least one compound selected from the group consisting of metal alkoxides and metal salts of organic acid, which process provides an oxide dielectric thin film having excellent orientation and crystalinity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7704321-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1641965-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1641965-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0687750-B1 |
| priorityDate |
1994-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |