| abstract |
A sulphonium salt is provided having the formula (1):n wherein R 1 , R 2 , and R 3 are independently substituted or unsubstituted aromatic groups, at least one of R 1 , R 2 , and R 3 is a substituted aromatic group having an acid labile group, and at least one of the remaining R groups is a nitrogenous aromatic group, or all of R 1 , R 2 , and R 3 are nitrogenous aromatic groups. A chemically amplified, positive resist composition comprising the sulphonium salt as well as an alkali-soluble resin and a dissolution inhibitor in an organic solvent has solved the PED problem. |