| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99e0f4d6b9573fcdaf2ff38e55fcd0a9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-702
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70583 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-00 |
| filingDate |
1994-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7ad99a717563897d9fd235792e5353f |
| publicationDate |
1998-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0658810-B1 |
| titleOfInvention |
Illumination device for an optical system with a reticle masking system |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9046787-B2 |
| priorityDate |
1993-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |