| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eacd252a35e563ff741cb2006460bb80 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1994-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2ad84e53b3ecfbbaa58386f403dae44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fed2eee1a287d8d1981fb25f9e8b13a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37692ec7e8c178ee21fe4199167688b2 |
| publicationDate |
2000-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0653681-B1 |
| titleOfInvention |
A process for device fabrication using an energy sensitive composition |
| priorityDate |
1993-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |