| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e08fd85d97265d6c31ab40f372843d81 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B64G1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B64G1-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B64G1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B64G1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-16 |
| filingDate |
1994-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebbe374341efeeb6ecaffc5dcee43e43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3c461cfe5d35c204f2166b830d848c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2c4bdd707c830318b64ef97fb5f7594 |
| publicationDate |
1995-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0641151-A1 |
| titleOfInvention |
RF plasma source and method for plasma cleaning of surfaces in space |
| abstract |
Contaminants are cleaned from the surface (94) of a body (92) in space by generating (104a) a substantially space-charge neutral reactive plasma, directing the plasma onto the contaminated surface (94) at an energy below the surface sputtering energy (typically 20 eV), and reacting the plasma with the contaminants to remove them. |
| priorityDate |
1993-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |