http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0626620-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ac17835c97e6c72213815ca74845386 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 1994-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d56c5da931667ce3178e33dc1b91685 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e66609bb5d133725b50f7b0bd9935fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89aac2fa9fde9f6c83de3194fd9c1ab4 |
| publicationDate | 1994-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0626620-A1 |
| titleOfInvention | Method for forming resist pattern |
| abstract | A method for forming a resist pattern which comprises irradiating an active light ray to a resist obtained by coating a photosensitive resin composition containing a compound capable of generating an acid due to irradiation of the active light ray and a silyloxy compound in a binder resin on a substrate through a pattern mask to decompose the silyloxy compound due to the acid generated at the irradiation region to form a silanol compound, and after removing the silanol compound, removing the exposed parts of the resist by oxygen plasma, the removal of said silanol compound being conducted by bringing the film after irradiation of the active light ray into contact with volatile organic solvent vapor having a boiling of not more than 150 DEG C. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9952018-A1 |
| priorityDate | 1993-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 76.