http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0626100-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_50e6fee10adc7878b9b2f0bb19214525
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
filingDate 1993-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56666473d158a831c16d95e5a93cb5a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d67f4f637d5e958d48d9264c0594e6a
publicationDate 1994-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0626100-A1
titleOfInvention Process for producing a semiconductor structure
abstract A vertical semiconductor component (13) can be integrated on a common semiconductor body (1) near the lateral semiconductor components (13), the latter being isolated from the vertical semiconductor component (14) by means of a PN junction. This way of isolating has, among other things, the disadvantage of requiring a lot of space for spreading the area of the space charge of the PN junction. This is why it is advantageous to carry out the insulation in another way. To this end, the partial structures (7) containing the lateral semiconductor components (13) are surrounded laterally by insulating walls (6). The walls start from a first surface (2) of the semiconductor body (1) to reach a certain depth and enter the semiconductor body. In the area of partial structures (7), the semiconductor body (7) to its thickness reduced by a second surface (3), so as to form a hollow (9) extending to the insulating walls (6) . Several vertical components can be integrated into the semiconductor body, apart from the partial structures (7).
priorityDate 1992-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758

Total number of triples: 20.