| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
1994-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e9dbb92dbc691c1c16b8b8a9dbd422c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_693f0e7048ed082c256b6082c83be17f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_030710b3667ec287070816ea6b843a64 |
| publicationDate |
1994-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0621355-A2 |
| titleOfInvention |
Process for manufacturing a hole structure in a silicium substrate |
| abstract |
To produce a hole structure (6) in a substrate (1) made of n-doped, monocrystalline silicon, the substrate (1) is provided with pores (4) by electrochemical etching from a first main surface (2), which have a depth corresponding to the depth the hole structure (6). A mask (5) is generated on the first main surface (2) of the substrate (1) and defines the cross section of the hole structure (6) parallel to the first main surface (2). With the aid of an etching which is selective with respect to mask (5), the hole structure (6) is produced by removing the silicon forming the side walls of the pores (4) which are not covered by the mask (5). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10245049-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19757560-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1220307-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1220307-A1 |
| priorityDate |
1993-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |