| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f25db8aac87fce7ba4fa082a674dc7e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B7-19 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08 |
| filingDate |
1989-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86cc998182764c05884bac10b88b0494
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e30631a13f17d504556c2efc0d9b8b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_303ccd8a27a6e41f37be4777eeef4e18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f56cd2821df36be004a35a54396724c |
| publicationDate |
1997-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0604393-B1 |
| titleOfInvention |
Diluted anhydrous hydrogen fluoride gas generator for use in dry etching apparatus |
| priorityDate |
1988-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |