http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0582538-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D317-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D317-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 1993-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17224bb41800209753bd9bd500b0b1d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5a9151f414bd2f8861b9eb9c636de4c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e925701df2fff1036fc249fb9770b926 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_197211f98886b0bbc497f72dbc209a1d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d03899c5c76022b75d359387f5c30ef6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7973416a591760e77fd7790af3c9d136 |
| publicationDate | 1994-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0582538-A2 |
| titleOfInvention | Propylene carbonate recovery process |
| abstract | Disclosed is a method of recovering a cyclic alkylene carbonate, such as propylene carbonate, from an effluent stream of a process in which the cyclic alkylene carbonate removes an organic photoresist material from a substrate. The effluent is a cyclic alkylene carbonate effluent, e.g., a propylene carbonate effluent, of the carbonate, water, and polymeric solids. In the recovery process the cyclic alkylene carbonate effluent is fed to a heat exchanger or evaporator (11), and separated into (i) water and volatiles, and (ii) cyclic carbonate. This lowers the concentration of water in the cyclic alkylene carbonate to a level that is low enough to substantially avoid hydrolysis of cyclic alkylene carbonate to the corresponding glycol. The dewatered cyclic alkylene carbonate is evaporated in an evaporator (41) to separate the cyclic alkylene carbonate from high boiling materials and polymeric solids. The dewatered cyclic alkylene carbonate is separated into (i) a cyclic alkylene carbonate fraction, and (ii) a photoresist solids fraction. The photoresist materials fractions contains photoresist material in the alkylene carbonate. The cyclic alkylene carbonate fraction is further separated in a fractionation colomn (71) into a higher vapor pressure alkylene glycol fraction, and a lower vapor pressure alkylene carbonate fraction. |
| priorityDate | 1992-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 462.