| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de0b31ad1eab71b151b13a3fe7eb31aa |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-00 |
| filingDate |
1993-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01f7ca8933baf2cae020762e3cbd42ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b79f63b9d4713202889801feea7ddcf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd3f5e1a58828d283dbdc64afa42a362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58507bc6c8d94668ca46c2c76f8821bf |
| publicationDate |
1997-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0555764-B1 |
| titleOfInvention |
Vacuum-processing apparatus |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006053678-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004055388-A1 |
| priorityDate |
1992-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |