http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0551616-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1b38ed9a5ab006aaeb2d76f86d7f9e33 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-4979 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-435 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49792 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 |
| filingDate | 1992-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd1a90ecb6bd359f8c16c148878b2b7a |
| publicationDate | 1993-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0551616-A1 |
| titleOfInvention | Method for dicing differential capacitor accelerometers |
| abstract | A method is proposed for separating a glass-silicon-glass layer package produced with minimized process expenditure, which contains a large number of acceleration sensors designed in micromechanical structural technology, in a process-appropriate manner. Contamination within the respective acceleration sensors is to be avoided and the connection contacts are to be automatically released. The separation is essentially achieved by cutting crosswise and then breaking. In order to avoid "opening" the acceleration sensors when cutting in one direction, ie transversely to the bending oscillator, and to achieve a defined breaking, one glass pane (3) is cut to a predetermined breaking distance (a) and the other glass pane ( 4) cut in a parallel plane. An intermediate layer 28, which surrounds the connection contacts (8, 9, 10) in a U-shape, serves as a barrier layer, which is provided between the two separation planes and prevents the glass pane (4) from being bonded to the silicon pane (2). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6573156-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0658770-A1 |
| priorityDate | 1992-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 23.