| abstract |
According to the invention, a probe for an atomic force microscope comprising a means for tunneling current is disclosed. The probe has a metal tip which is covered with a monomolecular film. The body of the probe is covered with a monomolecular laminated film, wherein conductive molecules are fixed on the the monomolecular film and/or the said monomolecular laminated film. The monomolecular laminated film has a closslinked electroconductive surface. The monomolecular laminated film is fixed on the metal by a covalent bond comprising a siloxane base (-SiO-), and the laminated part of the molecule is also chemically fixed on the metal surface by a covalent bond comprising a siloxane base (-SiO-). The probe of this invention is durable and can be put to practical use, because the films are surface conductive rather than conductive through its thickness. Moreover, compared with a conventional probe, since this probe does not metal deposited on the surface, it has high reproducibility with less process step to manufacture the probe. |