| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
1991-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb4531a77f1d5bd3e5dcbcc97ab2b5ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_219f4b439fca9d37de0df1892dc53923
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb66bb55bb0e53b15a520bc5db9a07f6 |
| publicationDate |
1993-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0538279-A1 |
| titleOfInvention |
METHOD FOR THINNING SUBSTRATES. |
| abstract |
A method of thinning corrodable substrates by caustic chemical solutions provides substrate layers having a predetermined thickness and an intact monocrystalline lattice structure. For this purpose, the substrate is irradiated during the corrosion process by radiation emitted by a radiation source and which falls essentially perpendicularly on the surface of the substrate. The substrate is made of a material which absorbs this radiation and the wavelength of the main part of the radiation is selected so that the absorption length of the radiation having this wavelength by the material of which the substrate is made or greater than the desired thickness of the substrate layers. |
| priorityDate |
1990-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |