| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 |
| filingDate |
1992-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44a3ad98615fd3e2880d4d2eae7fe245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1c7d4ce5ce426b12c04434fd1afd175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebe98a594d584179e51c81784b7cb747
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_557a14d7b5b1680e31b586f6b0992b9c |
| publicationDate |
1996-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0537099-B1 |
| titleOfInvention |
Control of large scale topography on silicon wafers |
| priorityDate |
1991-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |