| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
1992-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44a3ad98615fd3e2880d4d2eae7fe245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebe98a594d584179e51c81784b7cb747
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1c7d4ce5ce426b12c04434fd1afd175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_557a14d7b5b1680e31b586f6b0992b9c |
| publicationDate |
1993-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0537099-A1 |
| titleOfInvention |
Control of large scale topography on silicon wafers |
| abstract |
A method for the characterization of large scale wafer topography is applied to improving yields in the manufacture large scale integrated (LSI) devices. First, the heights at the center, the edge and an intermediate point are measured on eight equally spaced radii. This provides eight values each for Y s and Y e which are averaged. Then the shape angle α is computed using the following equation : The shape magnitude M is also computed using the following equation: n The thus computed values of α and M are correlated with individual wafer characteristics as to device performance and yield. Based on these results, the wafer processing is controlled to provide optimal wafer yield and isolation characteristics. |
| priorityDate |
1991-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |