http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0527058-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ecdfc9030125055f06a260938acdacab http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec22a290a4e6eb9afc29333122e1a262 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 1992-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34ef2c3134dda736002971da3d07e283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a512e74a9b7464a6d7d20cda1907d0a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4fd0288a1f34340b82d6abe40fc5469 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26696e318d784cba1b982dc5b175f6bc |
| publicationDate | 1993-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0527058-A1 |
| titleOfInvention | Apparatus for controlling a developing solution |
| abstract | The developing solution is used in developing photosensitive organic resin (photoresist) in a liquid crystal board manufacturing process, printed circuit board manufacturing process or the like. n The apparatus comprises means, such as an absorption photometer (16), for detecting the dissolved resin concentration in the developing solution and means, such as an electric conductivity meter (15), for detecting the alkali concentration of the developing solution. Means (3, 18, 21, 22, 24, 25, 26, 28) respond to the two detection means (15, 16) by replenishing the developing solution with undiluted developing solution and/or pure water to produce a desired dissolved resin concentration and a desired alkali concentration. Thus, the developing performance of the developing solution may be kept constant. Down time is save by removing the need to stop the manufacturing process to completely change the developing solution. |
| priorityDate | 1991-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.