http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0526312-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c425800404666db64f3b5c022ffb5193 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-066 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-06 |
| filingDate | 1992-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9be592a215677b5071847877883083c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42444615e6a01e14c805854dce683b82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ba5ce1bfd18ee98f564ebe51a671d2a |
| publicationDate | 1993-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0526312-A1 |
| titleOfInvention | Process and effusion cell for forming molecular beams |
| abstract | Primary molecules are formed by sublimation in a sublimation chamber (2) then transferred with a transfer rate in a cracking head (10) at higher temperature to be transformed there into lighter secondary molecules and form molecular jets (16) . According to the invention, the transfer rate is adjusted by adjusting an effective vector rate which is that of a vector gas introduced into the sublimation chamber by a supply tube (26) and sucked in by a suction tube ( 30).n n n The invention is particularly applicable to the production of III-V type semiconductor components by molecular beam epitaxy. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0707097-A1 |
| priorityDate | 1991-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.