abstract |
Fluorinated polyether compositions having reactive end groups, such as that represented by formula (I), can be crosslinked to produce vulcanized films usable as dielectrics in microelectronics applications. Other reactive end groups, for example allyl, benzocyclobutyl, N-phenylmaleimido, alkynylphenyl, styryl, allylphenyl, cyanophenyl and triazenophenyl, can also be used. |