| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S427-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-503
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-8408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-503
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate |
1992-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_790976b3a2e0f81ed9791a4cf59b400f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f99f621bbaee4bca0a11cf2d286d1e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52d8df82c3e482a228452d8d7ae7500e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e528026b0636980d1eabf5be827f003 |
| publicationDate |
1998-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0523609-B1 |
| titleOfInvention |
Method for forming a film with plasma CVD process |
| priorityDate |
1991-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |