| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-435 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-125 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate |
1991-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f19e810db96f196c3fc5e14a9e334b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d52906fd8b502565744bef94472f6760
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a133632fc1a06d067e273eac6b392f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37d90e798b03c75fbc0b383e921b535c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ed48b4a98d3f1d2ebb8278e75f266a8 |
| publicationDate |
1992-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0515416-A1 |
| titleOfInvention |
Integrable, capacitive pressure sensor and method for producing the same. |
| abstract |
A method of manufacturing an integratable capacitive pressure sensor comprises the following steps, from a semiconductor substrate: application of a separation layer (2), precipitation of a polycrystalline semiconductor layer (4), doping of the polycrystalline semiconductor layer (4) and removal of the separation layer (2) by pickling. In order to obtain a pressure sensor compatible with CMOS circuits and to increase the accuracy of the measurement, a semiconductor area (7) is isolated from the semiconductor substrate (1) and an insulating layer (8) is applied to the semiconductor area (7) isolated. The polycrystalline semiconductor layer (4) is arranged on the insulating layer (2), above the insulated semiconductor layer (7). |
| priorityDate |
1990-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |