| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-06 |
| filingDate |
1992-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d0c0aba7f4c347938e1e43f2a99aff3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab121ef468d7e3de1dcd87f18f5c1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8aabfca7567da8ceee0a0aefe18dbc2 |
| publicationDate |
1995-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0511145-B1 |
| titleOfInvention |
Method for determining the thickness of an interfacial polysilicon/silicon oxide film |
| priorityDate |
1991-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |