| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3af3390937c06df72b00e23a42cf63ef |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S204-13 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-164 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D13-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D13-22 |
| filingDate |
1991-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_770cf0d9781dc4a0501dc02cfb5ad482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ca3634cfdc3a8c4d347e0f47f63296b |
| publicationDate |
1992-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0493644-A1 |
| titleOfInvention |
Electrodialysis cell for removal of excess electrolytes formed during electrodeposition of photoresist coatings |
| abstract |
This invention provides a means of controlling the composition of electrodepositable photoresists emulsion. The system removes contaminants from the bath which may adversely effect the quality of the deposited coatings and allows for continuous monitoring of the conductivity of the system. |
| priorityDate |
1990-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |